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溅射铣蚀
释义
溅射铣蚀
Encyclopedia
工学
刻蚀工艺
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sputter etching and milling
溅射铣蚀
在集成电路制造中,利用低气压下惰性气体辉光放电所产生的离子,经加速后入射到薄膜表面,使裸露的薄膜被溅射而除去的技术。
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integral of angular-momentum
integral of Cauchy type
integral of center of gravity
integral of functions of complex variable
integral of generalized energy
integral of generalized momentum
integral of motion
integral of potential type
integral of three-body problem
integral operator
integral over a surface
integral over coordinates
integral over trajectories
integral part
integral part function
integral path
integral payoff
integral penetrant test device
integral point
integral polyhedron
integral polynomial
integral polytope
integral power
integral power series
integral prime ideal
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