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溅射铣蚀
释义
溅射铣蚀
Encyclopedia
工学
刻蚀工艺
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sputter etching and milling
溅射铣蚀
在集成电路制造中,利用低气压下惰性气体辉光放电所产生的离子,经加速后入射到薄膜表面,使裸露的薄膜被溅射而除去的技术。
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ordered Banach space
ordered basis
ordered binary decision diagram
ordered binary decision diagram, OBDD
ordered by magnitude
ordered Cartesian product
ordered chain complex
ordered class
ordered class of subobjects
ordered collection
ordered complex
ordered couple
ordered cycle
ordered direct product
ordered direct sum
ordered estimate
ordered extension
ordered factor group
ordered factorization
ordered field
ordered field extension
ordered geometry
ordered grammar
ordered group
ordered groupoid
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