“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	first lemniscate constant first Lemoine circle First-look Deal first loss insurance First Love first magnetization peak effect first main theorem first mathematical theorem of quantum mechanics first mean value theorem first mean value theorem of integral First Meeting at Lantern Festival first member first meridian first method of Lyapunov First Mexican Empire first mid-arc point first mining area First Ministers Conference first moment of area first Morley adjunct triangle first Morley center first Morley cubic first Morley triangle First Mover Advantage first multiplier theorem

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