“高密度等离子体刻蚀”的概念、定义、翻译、参考文献-科学参考

单词	高密度等离子体刻蚀
释义	高密度等离子体刻蚀 Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	principal G-object principal graduate principal graph principal group principal groupoid principal homogeneous G-set principal homogeneous space principal homomorphism principal horizontal line of photograph principal ideal principal ideal domain principal ideal ring principal ideal theorem principal idele principal idempotent principal idempotent element principal identity principal indecomposable module principal indecomposable representation principal integral domain principal integral representation principal invariant principal isotope principal isotropy group principalization

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。