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面形检测
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面形检测
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面形检测
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surface characterization testing
面形检测
通过一定手段对光学表面形貌进行检测,获得其表面面形与理想面形误差的方法。对光学元件进行高精度的检测成为光学系统正常有效运转的前提,光学检测水平决定了光学加工的水平。
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