“阴极溅射法”的概念、定义、翻译、参考文献-科学参考

单词	阴极溅射法
释义	阴极溅射法 Encyclopedia 理学阴极溅射法释 cathode sputtering阴极溅射法固体靶中的原子被高能量离子（通常来自等离子体）撞击而离开固体进入气体的物理气相沉积技术。又称溅镀。 Chemistry ＞无机化学＞固体化学＞释义 cathode sputtering method阴极溅射法
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。