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超精密光机系统
释义
超精密光机系统
Encyclopedia
工学
光刻投影物镜
释
ultra-precision opto-mechanical system
超精密光机系统
对光学元件进行精确空间定位与高精度面形支撑,同时实现物镜集成阶段的精密装调及使用阶段功能性补偿的光刻投影物镜。
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extension of a Lie algebra
extension of a mapping
extension of a measure
extension of a module
extension of an associative algebra
extension of an equation
extension of an ideal
extension of an operator
extension of a ring
extension of a ring by a module
extension of a semigroup
extension of a space
extension of a structure
extension of a topological space
extension of a valuation
extension of C* algebra
extension of C*-algebra
extension of C*-algebra (exact sequence)
extension of concept
extension of groups
extension of scalars
Extension of the Materia Medica
extension principle
extension problem
extension project of Louvre Museum
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