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谐振式微电子机械系统压力传感器
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谐振式微电子机械系统压力传感器
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工学
微电子机械系统
释
resonant micro-electromechanical system pressure sensor
谐振式微电子机械系统压力传感器
将微机电加工技术和机械谐振式传感技术有机结合而制成的压力传感器。
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element of geometry
element of infinite height
element of infinite order
element of information exchange
element of integration
element of length
element of orbit
element of regular wave
element of reserve
element of the first importance
element of volume
elemento organic chemistry
elemento-organic chemistry
elemento organic compound
elemento-organic compound
elemento-organic polymer
element organic polymer materials
element pair
element partition
element partitioning
element regular on the left
element regular on the right
Elements
elements
elements of absolute orientation
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