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菲索干涉仪测量法
释义
菲索干涉仪测量法
Encyclopedia
工学
光学零件面形偏差测量
释
fischer interferometer measurement method
菲索干涉仪测量法
采用等厚干涉原理,检测光学元件的面形、光学镜头的波面像差以及光学材料均匀性等的一种精密仪器的测量方法。
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