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聚焦离子束加工技术
释义
聚焦离子束加工技术
Encyclopedia
工学
【半导体工艺技术】
释
focus ion beam technology
聚焦离子束加工技术
通过液态金属镓(Ga)离子源产生的离子束经过离子枪加速,经聚焦后在样品表面扫描,收集离子束轰击样品产生的二次电子和二次离子,获得聚焦离子束显微图像的技术。
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