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聚焦离子束光刻
释义
聚焦离子束光刻
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磁致动器
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focused ion beam lithography
聚焦离子束光刻
在聚焦离子束技术基础上将原子离化后形成离子束的能量控制在10~200千电子伏特,在工件表面采用直接扫描、掩模曝光或者投影曝光加工微细线条图案,制备微纳器件的工艺。
Physics
>光学>纳米光学和超快光学>释义
focus ion beam milling
聚焦离子束光刻
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literary semiotics
Literary Series of the North
Literary Study Society of Guangzhou
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literary theory and criticism of Han dynasty
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literary vs. colloquial pronunciations of the Chinese characters
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Literary Works of Late Qing: Chuanqi and Zaju Plays
Literary Works on Landscapes in Kuaiji
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literature about seeking buddha dharma and travel notes
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