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聚焦离子束光刻
释义
聚焦离子束光刻
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focused ion beam lithography
聚焦离子束光刻
在聚焦离子束技术基础上将原子离化后形成离子束的能量控制在10~200千电子伏特,在工件表面采用直接扫描、掩模曝光或者投影曝光加工微细线条图案,制备微纳器件的工艺。
Physics
>光学>纳米光学和超快光学>释义
focus ion beam milling
聚焦离子束光刻
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liquefaction of sand
liquefaction of vitreous
liquefaction point
liquefaction potential
liquefaction process of Japanese bituminous coal
liquefaction process of Japanese brown coal
liquefaction ratio/rate of liquefaction
liquefaction system except for neon,hydrogen and helium
liquefaction temperature
liquefaction unit
liquefied fraction
liquefied gas
liquefied gas carrier
liquefied gas propulision system
liquefied natural gas
liquefied natural gas carrier
liquefied natural gas cold energy utilization
liquefied natural gas container
liquefied natural gas cylinders
liquefied natural gas fueling station
liquefied natural gas fuels and energy of fishing vessel
liquefied natural gas (LNG)
liquefied natural gas pomp
liquefied natural gas receiving terminal
liquefied natural gas transportation
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