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聚焦离子束光刻
释义
聚焦离子束光刻
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磁致动器
释
focused ion beam lithography
聚焦离子束光刻
在聚焦离子束技术基础上将原子离化后形成离子束的能量控制在10~200千电子伏特,在工件表面采用直接扫描、掩模曝光或者投影曝光加工微细线条图案,制备微纳器件的工艺。
Physics
>光学>纳米光学和超快光学>释义
focus ion beam milling
聚焦离子束光刻
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toward-target precision pesticide application system in forestry
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towed-bird frequency domain airborne electromagnetic instrument
towed bird time domain electromagnetic instrument
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