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绝缘层上硅
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绝缘层上硅
Encyclopedia
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释
silicon on insulator; SOI
绝缘层上硅
由顶层硅(Si)、二氧化硅(SiO2)绝缘层、硅衬底组成的三明治结构的半导体材料。是一种用于大规模集成电路制造的先进半导体衬底材料。又称绝缘体上硅。
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