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等离子体表面处理仪
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plasma cleaner
等离子体表面处理仪
通过利用对气体施加足够的能量使之离化成为等离子状态,利用这些活性粒子的“活化作用”来处理样品表面,实现清洁、改性、光刻胶灰化等目的的仪器。
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high Tc superconducting film
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