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等离子体干涉光刻
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等离子体干涉光刻
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等离子体光刻
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plasmonic interference lithography
等离子体干涉光刻
利用表面等离子体波的干涉效应,产生干涉光场,并将其记录在光刻胶上,从而实现超分辨图形加工的等离子体光刻技术。
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