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离子束抛光
释义
离子束抛光
Encyclopedia
工学
离子束抛光
释
ion beam figuring; IBF
离子束抛光
离子束抛光采用被充电的高能原子或离子(离子的质量较原子质量更大,因而可获得更大的动能),在真空状态下由离子枪射向工件,材料在离子束的轰击下实现去除。
工学
超精密加工
释
ion beam polishing
离子束抛光
利用离子束轰击工件进行的抛光加工方法。又称离子束修形、离子抛光、离子铣。
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