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硅基微机电系统
释义
硅基微机电系统
Encyclopedia
工学
微纳器件
释
silicon-based micro electro-mechanical system; silicon-based MEMS
硅基微机电系统
在硅、绝缘体上硅(silicon-on-insulator,SOI)等基底材料的基础上,应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看
The “End” of Art
The “Harmony” Character of Chinese Classical Dance
The “Lucy Poems”
THF
THFA
THG
THGA
T. H. Gronwall
T. H. Gronwall (1877—1932)
THI
thiabendazole
thiacloprid
thiacrown ether
thiacyclobutane
thiacyclobutane; thietane
thiacyclobutanone
thiacyclobutene
thiacyclobutene; thiete
thiacycloheptatriene
thiacycloheptatriene; thiepine
thiacyclopropane
thiacyclopropane; thiirane
thiacyclopropene
thiacyclopropene; thiirene
thiadiazole
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