“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	safety product validation safety profit safety protection safety protection and guarantee on navigable waters safety protection device safety protection for beryllium poisoning safety protection measures safety protection of drainage systems safety protection of hydrogen sulfide in well pad safety protection space safety protection textile design safety protective devices design safety protective fibers safety psychology safety range safety regulation for blasting safety regulations and standards of crane safety regulations and standards of lift safety regulations for blasting safety regulations for nuclear power plant safety regulations in coal mine safety-related part of a control system safety-related system safety related systems for thermal power plants safety requirements of lift

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。