“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	rare-earths-cobalt perma-nent magnetic material rare earth-sensitized luminescence materials rare earth solvent extraction separation and purification rare earth sulfate rare earth synergistic extraction rare element rare event rarefaction rarefaction analysis rarefaction impulse deconvolution rarefaction wave rarefied gas dynamics rarefied gas effects rarefied plasma rare gas rare gas laser rare gas; noble gas Rare Isotope Accelerator complex for On-line Experiments rarely used character Rarely Used Font Table of Chinese Character Standard (Taiwan Region of China) rare metal rare metal; less common metal rare metal ore deposit rare minnow Rare Old Edition of Quyi Qu Book Series · Chaozhou Song Book Volume

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。