“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	electrodereaction equation electrodes for removing dust electrodesintegration electrode tooling system electrode water heater electrodialysis electrodialyzer electrodiffusion electro-discharge machining electrodisintegration electrodispersion electrodrag electro-drill for coiled tubing electrodynamic meter electrodynamics electrodynamic vibration machine electrodynamometer electroelastic constant electroencephalogram electroencephalogram, EEG electroencephalogram examination electroencephalograph Electroencephalograph analysis electroencephalography electroencephalograpy

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。