“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Changde flower-drum opera Changde Han opera Changde Museum Changdeng opera Changdeokgung Palace Changdeokgung Palace Complex Changde Shi Changde Sixian narrative singing music Chang Di Changdi Tribe Chang-Du Subgroup of Gan Dialect Chang'e change Chang'e 1 Chang'e 1 lunar probe Chang'e 2 Chang'e 3 Chang'e 4 Chang'e 5 changeability changeable order reaction Change and Constant of Morality change azimuth change behavior strategy Change by Design

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