“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	molecular phylogenetics molecular phylogeny of medicinal resources molecular phylogeography of medicinal resources molecular physics Molecular Plant Molecular Plant Breeding molecular plating molecular point group molecular polarity molecular polarizability molecular potential energy curve molecular potential energy surface molecular precision molecular probe molecular proposition molecular quantum mechanics molecular ratio molecular reaction dynamics molecular rearrangement molecular recognition molecular reflection molecular refraction molecular regulation molecular ribbon molecular rotation

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。