“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	utilization of tea germplasm utilization of time delay utilization of waste heat in rural areas utilization of waste mud utilization of weed resources utilization of wind energy utilization rate of return water utilization rate of tonnage(seat) utilization ration of industrial waste water，waste gas and solid waste utilization ratio of sunlight energy utilization time utilize Uti Possidetis UTL UTLS UTM utmost UTM projection Utopia utopian communism utopian ideal of city Utopian socialism utopian socialistic population theory Utopia Office Utopia Planitia

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。