“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Maori Culture Maori dance Maori number system Maori Parliamentary Movement Maori Party Maori Wars Maori Women’s Welfare League Mao's Commentaries about the Book of Songs Maoshan Maoshan Changqing tea Maoshan Sect of Taoism Maoshan Shanmai Mao Shanyu maoshiguxunchuan Maoshi Guyin Kao, A Research on Ancient Sounds in Shijing Mao Shoubai Mao Songyou Maotai Zhen Maotiao He Maowanli Kiln Site Mao Wei Mao Weitao Mao Wenlong Maowen stele with buddhist statues Mao Wenxi

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