“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	remainder set remainder term remainder theorem remainder type remaining geological reserves remaining oil Remaining oil monitor Remaining Records of Southern China remaining service time remaining star remaining strategy remain of royal academy and Wang Mang's ancestral temple of Western Han remain of Secondary Capital of Yan remain of stilted building，Maojiazui remain of Zhouyuan architecture Remains remains of Hun in Russia Remains of Moxibustion Method Drawing Remak Remak decomposition remalloy remanence remanent magnetic induction remanent magnetism remanent magnetization

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。