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硅基光电子集成技术
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硅基光电子集成技术
Encyclopedia
工学
光电子学与集成技术
释
silicon-based optoelectronic integrated technology
硅基光电子集成技术
研究微米/纳米级光子、电子及光电子器件的工作原理,并使用与硅基集成电路兼容的方法,单片或混合集成在同一硅衬底上的技术。
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更新时间:2026/11/16 6:38:17