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硅基传感器
释义
硅基传感器
Encyclopedia
工学
[传感器材料]
释
silicon based sensor
硅基传感器
敏感结构由硅材料制作,或者以硅材料为衬底,在衬底上制作薄膜敏感结构的传感器。又称硅传感器、硅换能器。
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