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电感耦合等离子体化学气相沉积
释义
电感耦合等离子体化学气相沉积
Encyclopedia
工学
【半导体工艺技术】
释
电感耦合等离子体化学气相沉积
基于传统等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition; PECVD)技术,结合电感耦合等离子体技术产生的一种化学气相沉积方法。
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hell
Hella Maria Wuolijoki
Hellas
Hellas Basin
Hellas Planitia
Hellenic Broadcasting Corporation
Hellenic Cinemaand Television School Stavrakos
Hellenistic Age
Hellinger
Hellinger distance
Hellinger-Hahn theorem
Hellinger integral
Hellinger-Reissner two-field generalized variational principle
Hellinger-Reissner variational principle
hell is other people
Hellman
Hellmann Feynman theorem
Hellmann-Feynman theorem
Helly
Helly condition
Helly number
Helly principle of selection
Helly selection theorem
Helly theorem
Helly-type theorem
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