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电感耦合等离子体化学气相沉积
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电感耦合等离子体化学气相沉积
Encyclopedia
工学
【半导体工艺技术】
释
电感耦合等离子体化学气相沉积
基于传统等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition; PECVD)技术,结合电感耦合等离子体技术产生的一种化学气相沉积方法。
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late adulthood
Late-arriving Northern migrants
late barrier
late barrier reaction
late biological effect of nuclear explosion
latebrose
Late Cermian coal-accumulating period
late classic period
late cluster
late cropping
late-developing advantage
late developing countries
late effect
late endosome
late fee
late heavy bombardment
late Homo sapiens
late integrated Sachs-Wolfe effect
late-life depression
late-life loneliness
late maturing variety of grass plant
late-model
late modernism
latency
latency hiding
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