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牺牲层技术
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牺牲层技术
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释
sacrificial layer technology
牺牲层技术
在表面微加工工艺中,为形成微机械结构的空腔或可活动的微结构,先在下层薄膜上沉积所需的结构件,再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件,得到上层薄膜结构(空腔或微结构件)的加工方法。
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axiom about adding and subtracting forces
axiom about adding forces
axiom about adding or subtracting forces
axiom about parallelogram rule for forces superposition
axiom about subtracting forces
axiom A diffeomorphism
axiom A flow
axiomatic
axiomatical
axiomatic approach
axiomatic class
axiomatic cohomology theory
axiomatic complexity
axiomatic computability
axiomatic construction
axiomatic convexity
axiomatic deductive method
axiomatic definition
axiomatic design
axiomatic field theory
axiomatic foundation
axiomatic geometry
axiomatic homology theory
axiomatic method
axiomatic model class
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