“浸入式光刻技术”的概念、定义、翻译、参考文献-科学参考

单词	浸入式光刻技术
释义	浸入式光刻技术 Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	time-averaged holography time-averaged interferometry time average holographic interference time average measurement time average method time averaging time averaging method time axis time balance time-bandwidth product time base time-base time-base instability time base marker time-base stability time bill time-bounded Turing machine time budget time censored test time change time characteristic time chart time coarse check time code time comparison

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。