“浸入式光刻技术”的概念、定义、翻译、参考文献-科学参考

单词	浸入式光刻技术
释义	浸入式光刻技术 Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	Shui Binɡxin Shuibuya Hydropower Station Shuicheng Qu Shuicun shuidao Shuidonggou Formation Shuidonggou Site Shuidong Wan Shui'e Shui embroidery shuifen Shuifu Shi shuigou Shui Hua Shuihui garden Shuihui Garden in Rugao Shuijian of Shuiyang River Shuijing Dramatic Stage of Shanxi Guild Hall in Duolun County Shuijing Stage in the Jin Temple Shuijingtuo Formation Shui Jing Zhu Shuikou Hydropower Station Shuikoushan lead-zinc deposit Shuikou ship lift Shuikou Shuiku

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