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气相沉积
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physical/chemical vapor deposition
气相沉积
利用气相中发生的物理或化学过程,在工件表面形成功能性或装饰性的金属、非金属、化合物单层或多层薄膜的技术。
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凝聚态物理学
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vapor deposition
气相沉积
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