“晕环注入”的概念、定义、翻译、参考文献-科学参考

单词	晕环注入
释义	晕环注入 Encyclopedia 工学离子注入工艺释 halo implant晕环注入在集成电路制造中，通过大角度倾斜注入（largeangle tiled implant，LATI）与衬底相同类型的掺杂离子，在源漏区和衬底之间形成晕环（Halo）结构高掺杂区的技术。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。