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快速热退火
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快速热退火
Encyclopedia
工学
杂质扩散工艺
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rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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boundary treaty
boundary type
boundary uniqueness
boundary value
boundary value analysis
boundary value condition
boundary value control
boundary value problem
boundary-value problem
boundary value problem of analytic function
boundary value problem of electromagnetic field
boundary-value problem of electromagnetic field
boundary value problem of the first kind
boundary value problem of the second kind
boundary value problem of the third kind
boundary-value problems of electromagnetic field
boundary value representation
boundary variation
boundary vorticity flux
boundary wave
bound-bound absorption
bound bound laser
bound-bound laser
bound bound transition
bound-bound transition
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