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快速热退火
释义
快速热退火
Encyclopedia
工学
杂质扩散工艺
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rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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surface acoustic wave(SAW)sensor
surface activation treatment
surface activator
surface active agent
surface activity
surface-adsorbed water
surface adsorption
surface alloy
surface alloying technology
surface analysis
surface analysis and detection
surface analysis in vacuum
surface analysis technique
surface and ground movement
surface and interface effect
surface and interface scattering
surface and interfacial mechanics of biomaterials
surface and underground combined mining
surface and underground mining at the same time
surface applicators therapy
surface approximation
surface area
surface area of a solid object
surface area of lake
surface areas and pore structures of catalysts
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