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快速热退火
释义
快速热退火
Encyclopedia
工学
杂质扩散工艺
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rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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analytic signal
analytic singular support
analytic solution
analytic space
analytic spread
analytic straight line
analytic structure
analytic subgroup
analytic submanifold
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analytic subset
analytic subspace
analytic subvariety
analytic surface
analytic tableaux
analytic technique of capital structure decision
analytic theory
analytic theory of differential equation
analytic theory of differential equations
analytic theory of numbers
analytic theory of population
analytic thread
analytic torsion
analytic transformation
analytic variety
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