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快速热退火
释义
快速热退火
Encyclopedia
工学
杂质扩散工艺
释
rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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secondary diagonal
secondary diffraction
secondary disaster of earthquake
secondary distance indicator
secondary dosimeter
secondary eclipse
secondary education
secondary electrical power supply
secondary electron
secondary electron emission
secondary electron emission microscopy
secondary electron emission microscopy, SEEM
secondary element
secondary emission
secondary energy
secondary enlargement
secondary enriched zone in tailings pond
secondary entry
Secondary environment
secondary environment
secondary extinction
secondary fan
secondary fermentation
secondary field
secondary fissure
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