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快速热氧化
释义
快速热氧化
Encyclopedia
工学
硅热氧化工艺
释
rapid thermal oxidation
快速热氧化
在极短的时间内通过快速升降温在高温下实现硅表面迅速热氧化的半导体制造工艺技术。是快速热处理工艺之一。
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