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微纳机电一体化
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微纳机电一体化
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工学
机电一体化
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micro/nano mechatronic
微纳机电一体化
微纳机电系统(MEMS/NEMS)将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺,制作到芯片上,并通过与电路相互之间的高度集成来构筑复杂的微型系统。
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category with composition
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category with direct limits
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category with pushouts
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