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微电子机械系统专用集成电路
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微电子机械系统专用集成电路
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微电子机械系统
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micro-electromechanical system application specific integrated circuit
微电子机械系统专用集成电路
采用标准互补金属氧化物半导体(complementary metal oxide semiconductor; CMOS)工艺制作,通过金属压焊线将敏感结构和电路连接起来,专为微电子机械系统(micro-electromechanical system; MEMS)器件设计的接口电路。
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thermodynamic equilibrium
thermodynamic equilibrium state
thermodynamic equilibrium state condition
thermodynamic fluctuations
thermodynamic flux
thermodynamic force
thermodynamic formalism
thermodynamic fragmentation
thermodynamic freeze-out
thermodynamic freezing-in
thermodynamic function
thermodynamic integration
thermodynamic integration method
thermodynamic isotope effect
thermodynamic laws
thermodynamic limit
thermodynamic parameter
thermodynamic parameters
thermodynamic perfect degree
thermodynamic perturbation
thermodynamic perturbation method
thermodynamic phase
thermodynamic potential
thermodynamic principle
thermodynamic probability
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