“微机械陀螺仪”的概念、定义、翻译、参考文献-科学参考

单词	微机械陀螺仪
释义	微机械陀螺仪 Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	symbolization control table Symbolize symbol learning theory symbol manipulation language symbol map symbol media symbol module symbol O symbol o symbol of a binary composition symbol of a differential equation symbol of a differential operator symbol of an elliptic complex symbol of an equation symbol of an integral operator symbol of an operation symbol of an operator symbol of a pseudodifferential operator symbol of a unary operation symbol of a vector field Symbol of Chinese cultural heritage symbol of conjunction symbol of disjunction symbol of equivalence symbol of happy encounters

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