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微机械陀螺仪
释义
微机械陀螺仪
Encyclopedia
工学
陀螺仪
释
micromechanical gyroscope
微机械陀螺仪
采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺,将机械装置和电子线路集成在微小的硅芯片上完成,最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
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deferred measurement principle
deferred processing
deferred reaction
deferred shading
deff
defiber
defibrator system
defibrillator
deficiency
deficiency index
deficiency inward collapse
deficiency loop
deficiency number
deficiency of a curve
deficiency of a matrix
deficiency of an operator
deficiency of a polarity
deficiency of a spline
deficiency of both heart and spleen
deficiency of both qi and blood
deficiency of both qi and yin
deficiency of coagulation factor caused by hepatopathy
deficiency of either yin or yang
deficiency of heart blood
deficiency of heart qi
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