“微机械陀螺仪”的概念、定义、翻译、参考文献-科学参考

单词	微机械陀螺仪
释义	微机械陀螺仪 Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	adsorption indicator adsorption isotherm adsorption isotherm equation adsorption isotherms at the solid liquid interface adsorption isotherms at the solid-liquid interface adsorption kinetics adsorption of gases by solids adsorption of liquids on solids adsorption of solid surface adsorption phenomenon adsorption polymer adsorption polymerization adsorption processes and their physical expressions adsorption pump adsorption refrigeration cycle adsorption refrigeration system adsorption separation adsorption site adsorption solvent strength parameter adsorptive desulfurization adsorptive power adsorptive stripping voltammetry adsorptivity AdS/QCD AdS/QCD correspondence

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