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微执行器
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微执行器
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micro actuators
微执行器
尺度或运动精度在1~100微米的把能量转化为力和运动的微机械部件或器件。
理学
微纳米机电系统
释
micro-actuator
微执行器
微机电系统(MEMS)、微流控系统及微机械人等微系统中的重要核心部分。
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