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干法刻蚀
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干法刻蚀
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干法刻蚀
释
dry etching
干法刻蚀
通过物理和化学方法相结合去除被刻蚀薄膜的技术。
工学
磁致动器
释
dry etching
干法刻蚀
利用气体或等离子体与材料表面反应形成挥发性物质,或直接轰击材料表面使之被去除的一种可控的工艺过程。
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