“局部氧化”的概念、定义、翻译、参考文献-科学参考

单词	局部氧化
释义	局部氧化 Encyclopedia 工学硅热氧化工艺释 local oxidation局部氧化在半导体硅片上的选定区域中形成低于衬底表面的二氧化硅，以实现器件隔离的集成电路制造工艺技术。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。