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射频等离子体
释义
射频等离子体
Encyclopedia
工学
﹝等离子体驱动形式﹞
释
radio-frequency plasma
射频等离子体
使用频率范围在1~200兆赫的射频交变电源驱动,放电产生的等离子体。
理学
气体放电
释
radio frequency plasma
射频等离子体
由射频电磁场(2~200兆赫)激励气体放电产生的等离子体。包括容性耦合等离子体、感性耦合等离子体和螺旋波等离子体。
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