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多功能集成微电子机械系统传感器
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多功能集成微电子机械系统传感器
Encyclopedia
工学
微电子机械系统
释
multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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Illustration Photography
Illustrations and Explanations of Ceramic Production
Illustrations and Explanations of Several Newly-built Devices
Illustrations for A Dream of Red Mansions
Illustrations for the "Artificer's Record"
Illustrations of Military Victories
"Illustrations of Rivers and Canals", Illustrated Record of Chang'an
illustrations of The Biographies of Exemplary Women
Illustrations of the Li People in Hainan Island
illustrative
illustrative diagram
illustrative example
illustrator
illuvial horizon
illuviate
illuviation
illuvium
ILM
Ilmari Kianto
Ilmenite
ilmenite
Ilmovaia Pad Cemetery
ILO
Ilocano
Ilocans
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