“多功能集成微电子机械系统传感器”的概念、定义、翻译、参考文献-科学参考

单词	多功能集成微电子机械系统传感器
释义	多功能集成微电子机械系统传感器 Encyclopedia 工学微电子机械系统释 multi-function integrated micro-electromechanical system sensor多功能集成微电子机械系统传感器利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上，实现多参数测量的传感器。
随便看	method of spherical harmonics method of spherical means method of splitting of the square method of splitting operators method of stages method of stationary phase method of statistical experiment method of statistical testing method of steepest ascent method of steepest descent method of steps method of straight lines method of stratified sampling method of streamline curvature method of subdivision method of substitution method of successive approximation method of successive approximations method of successive division method of successive elimination method of successive generations method of successive iteration method of successive relaxation method of successive substitutions method of summation

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