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多功能集成微电子机械系统传感器
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多功能集成微电子机械系统传感器
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工学
微电子机械系统
释
multi-function integrated micro-electromechanical system sensor
多功能集成微电子机械系统传感器
利用集成电路技术工艺和微机械加工方法将基于各种物理效应的机电敏感元器件和处理电路集成在一个芯片上,实现多参数测量的传感器。
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spatial interaction models
spatial interaction theory
spatial interpolation
spatial invariance
spatial isolation
spatial isomorphism
spatial justice
spatial knowledge discovery
spatial level of urban master planning
spatial light modulator
spatial linkage of economic activity
spatial locale
spatial locality
spatiallocationofeconomicactivities
spatial logics
spatially closed metric
spatially coherent light
spatially homogeneous
spatially homogeneous process
spatially-induced dispersion
spatially isomorphic
spatially isomorphic flow
spatially open metric
spatially-oriented hyperplane
spatially-oriented surface
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