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外差激光干涉测量
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外差激光干涉测量
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外差激光干涉测量
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heterodyne laser interferometer
外差激光干涉测量
干涉光路中测量光和参考光波长(频率)不同,存在一个较小的频差,通过光路设计,使测量光与参考光相互干涉获得干涉信号,其本质是以激光波长作为测量基准,通过监测激光在参考臂、测量臂中光程差、相位差或频差的变化,获得被测目标的位移量或位移相关量。
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