“chemical vapor deposition technology”的概念、定义、翻译、参考文献-科学参考

单词	chemical vapor deposition technology
释义	chemical vapor deposition technology Encyclopedia 工学【红外探测器工艺】释 chemical vapor deposition technology化学气相沉积工艺反应物质在气态条件下发生化学反应，生成固态物质沉积在加热的固态基体表面，形成薄膜或涂层的工艺技术。
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