“chemical mechanical planarization”的概念、定义、翻译、参考文献-科学参考

单词	chemical mechanical planarization
释义	chemical mechanical planarization Encyclopedia 工学平坦化工艺释 chemical mechanical planarization化学机械平坦化在集成电路制造中，通过化学机械抛光方法来抛光基片表面，实现全局平坦化和形成金属互连线图形的技术。是集成电路后道工序的关键工艺。
随便看	plunger pump plunging pluperfect number plural pluralism pluralist democracy pluralistic evaluation Pluralistic views of Public Administration plurality plurality system pluramelt pluri- pluricanonical hypersurface pluricanonical line bundle pluricanonical ring pluricanonical system plurigenus pluriharmonic pluriharmonic distribution pluriharmonic function pluriharmonicity plurilateral services agreement plurinuclear pluripolar pluripolar set

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。