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基于掺杂的自停止技术
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基于掺杂的自停止技术
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工学
[传感器制造]
释
doping-based etch-stop technology
基于掺杂的自停止技术
硅基传感器在腐蚀工艺过程中,当腐蚀液腐蚀到硅中掺杂的其他元素(如硼、磷)、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时,腐蚀速率出现明显停滞,导致腐蚀自动终止的一种工艺技术。
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independent assortment
independent axiom
independent axiom system
independent baseline
independent battalion
Independent Book Publishers Association
independent bookstore
independent brain computer interface
Independent Broadcasting Authority
independent calculus
independent catalogue
independent class
independent coexistence principle
independent college
independent column
Independent Commission Against Corruption, ICAC
independent complement
independent component
independent component analysis
independent component analysis technique
independent conditioning of HVAC terminal
independent coordinate system
independent coupling
independent culling
independent curator
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