“基于掺杂的自停止技术”的概念、定义、翻译、参考文献-科学参考

单词	基于掺杂的自停止技术
释义	基于掺杂的自停止技术 Encyclopedia 工学［传感器制造］释 doping-based etch-stop technology基于掺杂的自停止技术硅基传感器在腐蚀工艺过程中，当腐蚀液腐蚀到硅中掺杂的其他元素（如硼、磷）、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时，腐蚀速率出现明显停滞，导致腐蚀自动终止的一种工艺技术。
随便看	adsorption-coprecipitation adsorption/desorption adsorption/desorption rate adsorption energy adsorption equilibrium adsorption gas storage adsorption heat adsorption indicator adsorption isotherm adsorption isotherm equation adsorption isotherms at the solid liquid interface adsorption isotherms at the solid-liquid interface adsorption kinetics adsorption of gases by solids adsorption of liquids on solids adsorption of solid surface adsorption phenomenon adsorption polymer adsorption polymerization adsorption processes and their physical expressions adsorption pump adsorption refrigeration cycle adsorption refrigeration system adsorption separation adsorption site

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。