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反应离子刻蚀
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反应离子刻蚀
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reactive ion etching
反应离子刻蚀
将物理性的离子溅射刻蚀和化学性的等离子刻蚀两种方法相结合的物理/化学刻蚀技术。
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凝聚态物理学
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reactive ion etching
反应离子刻蚀
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>分析化学>仪器分析>释义
reaction ion etching
反应离子刻蚀
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