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化学气相渗入
释义
化学气相渗入
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工学
[薄膜材料]
释
chemical vapor infiltration
化学气相渗入
将具有特定形状的预制体置于沉积炉中,通入的气态前驱体通过扩散、对流等方式进入预制体内部,在一定温度下发生复杂的化学反应,生成固态的陶瓷类物质并以涂层的形式沉积于增强相表面或孔隙中,随着沉积的继续进行,孔隙越来越小,最终成为连续相,即陶瓷基体的方法。
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