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化学气相淀积工艺
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化学气相淀积工艺
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工学
化学气相淀积工艺
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化学气相淀积工艺
利用一定化学配比的反应气体,在特定激活条件下(通常是一定高的温度环境),把通过气相化学反应生成的新的膜层材料淀积到基片上制取膜层的一种工艺。
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