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化学气相沉积工艺
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化学气相沉积工艺
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工学
【红外探测器工艺】
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chemical vapor deposition technology
化学气相沉积工艺
反应物质在气态条件下发生化学反应,生成固态物质沉积在加热的固态基体表面,形成薄膜或涂层的工艺技术。
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