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分子束外延半导体材料生长
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分子束外延半导体材料生长
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molecular beam epitaxy growth method for semiconductor material
分子束外延半导体材料生长
在高真空或者超高真空环境下,利用热蒸发源,在衬底上沉积原子或者分子束,外延生长高质量单晶薄膜的技术。
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