“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	resonating valence bond model resonating valence bond model, RVB model resonating valence bond state resonating valence bond state, RVB state resonating valence bond theory resonating valence bond theory, RVB theory resonator resonator sensor resonator silencer resonoscope resorb resorcinol resorption resorptivity resort resort style resouce influence of museum resound resource resource abuse resource accounting management resource accumulation management resource alarm resource allocation resource allocation efficiency

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