“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	Central Reserve Bank of the El Salvador central retinal artery occlusion central ridge rift in mid-oceanic ridge Central Russian Upland Central Saint Martins College of Art and Design central scheme Central Secretariat central section central separable algebra central sequence central series central series of a group central series of a subgroup Central Shanxi urban agglomeration central shutter Central Siberian Plateau Central Sikhote-Alin central simple algebra central solution Central Song and Dance Ensemble Central South People's Radio Central South University Central South University Library Central South University of Forestry and Technology Central Soviet Area (MinXi) History Museum

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