“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	coefficient of variation of grade coefficient of viscosity coefficient of volume expansion coefficient of wear coefficient problem coefficient region coefficient ring coefficients of fractional grandparentage coefficients of fractional parentage coefficient space coefficient theorem coefficient varying system coefficient-varying system coeficient coelacanths (fossil) coelectrodeposition coelenteron coeliac trunk coelom coelomate coelomic fluid examination coelomocyte coelonavigation coelongate coelosphere

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