“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	China Radio International，CRI China railway construction fund China Railway Express Co.,Ltd. China Railway Express to Europe China Railway High-speed China Railway Museum China Railway Publishing House China Railways JF China Railway Society China Reading Weekly China Record China Record Corporation China Record Distribution Company China Record Group Co., Ltd China Record Group Co.,Ltd China Recreational Angling Association China redactological society China Red Data Book of Plants China Red Post Hunan Jiangxi Provincial General Administration License China Red Sandalwood Museum China Re-entry to IMF China Re-entry to the World Bank China Refining Technology China regional planning study China Renewable Energy Society

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