“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	non-numerical geocomputation non-nutritive feed additive non-objective grating and Grism non-occurrence of event non-offensive/against military aggression non-ohmic behavior non-ohmic heating non-ohmic material non-open end spinning non-operating expenses non-operating incomes non-operating water conservancy project non-orientability non-orientable non-orientable contour non-orientable development non-orientable manifold nonorientable manifold non-orientable polyhedron non-orientable surface non-oriented non-oriented cobordism non-oriented graph non-oriented silicon steel non-oriented surface

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