“光栅衍射对准测量”的概念、定义、翻译、参考文献-科学参考

单词	光栅衍射对准测量
释义	光栅衍射对准测量 Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	Fraunhofer corona Fraunhofer crater Fraunhofer diffraction Fraunhofer diffraction by a slit Fraunhofer diffraction by double slits Fraunhofer diffraction by multiple slits Fraunhofer diffraction phenomena Fraunhofer hologram fraunhofer hologram Fraunhofer, Joseph von Fraunhofer line Fraunhofer lines Fraunhofer region Fraunhofer Society for the Advancement of Applied Research Fraunhofer spectrum fraxetin-8-glucoside fraxin fraxin; fraxoside; paviin; fraxetin-8-glucoside fraxoside frazil slush ruler frazil slush sampler FRB FRD freak wave Frechet

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