“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	stable differentiable mapping stable differential equation stable dimension stable discrete time system stable discretization stable distribution stable element stable equilibrium stable equivalence stable expression stable fiber bundle stable flow stable framing stable from the inside stable geodesic stable germ stable group stable group pair stable homomorphism stable homotopy stable homotopy category stable homotopy group stable homotopy theory stable ideal stable improper node

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。