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光刻机照明系统
释义
光刻机照明系统
Encyclopedia
工学
光刻机照明系统
释
lithography illumination system
光刻机照明系统
为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统,介于曝光光源和投影物镜之间。
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stone sculptures in Qiaoling Mausoleum
stone sculptures in Shunling Mausoleum
stone sculptures in Vairochana Grotto
stone sculptures in Zhaoling Tomb
stone sculptures of Huo Qubing's tomb
Stone Sculptures of Khitan script
stone sculptures of Ming Tombs
stone sculptures of Shuining Temple
stone sculptures of Southern Dynasties
stone sculptures of Southern Dynasties mausoleums
stone sculptures of the Han court garden
stone sculptures of Xiao Tomb
stone sculptures of Zhaoling mausoleum of Qing Dynasty
stone sculptures with characters of Huo Qubing's tomb
stone setting
stone shrine
stone sketch
stone slab correction
Stone Slab Tombs of Han Dynasty at Langgengranshan,Zhenfeng
Stone space
Stone Statue of Constantine
Stone Statue of Tetrarchy
stone statues at Longxing Temple,Qiongla
Stone Statues in Chengdu Wanfo Temple
stone statues of Northern Dynasty
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