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光刻机照明系统
释义
光刻机照明系统
Encyclopedia
工学
光刻机照明系统
释
lithography illumination system
光刻机照明系统
为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统,介于曝光光源和投影物镜之间。
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writing show the brilliance of tao
writing skill
writing skills during the spring and autumn period
writings of portrait painting in Qing Dynasty
Writings of the Orthodox School
Writings on Connoisseurship of Ming Calligraphies, Paintings and Other Antiquities
Writings on Plum Painting
writing symbols
Writing text
writing tools
writing transmitters
written constitution
written decision of administrative compensation
written explanation
Written interview
written language
written language and literature of the Shui nationality
written law
written law carved on bamboo slips
written-news sheets
Written on Bamboo and Silk
Written on the Red Leaf
written proclamations for admonishment
written proposal
written report to a superior official
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