“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Pronunciation Unification Meeting Prony Prony index model spectrum estimation pro-object proof Proof about the Collection of Criticism on Poets and Poetry of Tang Dynasty proof by cases proof by contradiction proof by induction proof by reductio ad absurdum proof by superposition proof by transfinite induction proof complexity proof figure proof geometry proof in full proofing proof line proof method proof of consistency proof of deducibility proof of existence proof of identity proof of program correctness proof of work

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。