“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	daylight saving noon daylight saving time daylight spectrum daylight stream daylight type colour film daylily day lily garden Day Lily ,Rock by Wen Ti day-neutral plant day night equivalent sound pressure level day-night equivalent sound pressure level day-night rhythm day number day of autumnal equinox day of summer solstice Day of the Seafarer day of vernal equinox day of winter solstice day of year dayong day range day side Days of Being Wild days of payment day star

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。