“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	totally real submanifold totally recursive subclass totally reflexive relation totally regular method totally regular ring totally regular transformation totally self-checking circuit totally sigma-finite measure totally singular subspace totally stable solution totally summable basis totally symmetric loop totally symmetric plane partition totally symmetric plane partition theorem totally symmetric plane partition (TSPP) totally symmetric polynomial totally symmetric quasigroup totally symmetric self-complementary plane partition totally thin set totally transcendental theory totally umbilical totally umbilical hypersurface totally umbilical submanifold totally unimodular matrix totally unstable solution

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。