“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	calculation methods of free energy calculation method with abacus calculation of cleanroom calculation of displacement calculation of environmental flow in streams calculation of hydraulic transients calculation of mine ventilation quantity calculation of pollution carrying capacity on water function zone calculation of possible sunshine by outline shading diagram calculation of reserves calculation of river surface profile calculation of uranium content by delayed fission neutron logging calculation of uranium content by prompt fission neutron logging calculation of uranium content by uranium gamma-ray logging calculation of uranium reserves by gamma-ray logging calculation on controlled quantity of pollutants discharge in rivers and lakes Calculations calculation section map of reserves calculations of concentrator equipment calculation with an abacus calculation with limits calculation with powers calculation计算量的极小化 calculator calculus

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。