“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	identical polynomials identical relation identical representation identical substitution identical transformation identical truth identical twins identic pattern of rhythm identifiability identifiable identifiable design identification identification and appraisal of injury degree identification and characterization of genomic information Identification and Description Subcommittee of Information and Documentation Technical Committee SAC/TC46/SC9 identification and localization technology of engineering site identification basis of crude drug identification capacity identification chart identification document photography identification for efficient utiliztion of nutrients in crop plants identification friend or foe electronic warfare identification loss identification mapping identification method of quarantine pests

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。