“光刻机照明系统”的概念、定义、翻译、参考文献-科学参考

单词	光刻机照明系统
释义	光刻机照明系统 Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	flight crew emergency exits evacuation demonstration Flight crew operation plan flight data recorder systems flight declination correction flight delay flight director system flight dynamics of aircraft flight envelope flight fault detection flight fault isolation flight fault prediction flight feather flight hazardous weather flight health management flight height flight illusion flight information region flight information service flight line of aerial photography flight management system flight managment system flight mechanics Flight Opeation Center flight operation control flight path angle of aircraft

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。