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光刻投影物镜
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光刻投影物镜
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光刻投影物镜
释
lithography projection objectives
光刻投影物镜
将集成电路芯片的掩模图形线条按照-0.25的微缩倍率经曝光投影后复制到硅片上的光刻机组件。是光刻机中最精密的核心部件。
随便看
plane problem of elasticity
plane projective geometry
plane quadratic system
planer
plane real algebraic curve
plane region
plane rotation transformation
planer safety
planer tool
plane section
plane-separation axiom
plane [shock] wave generator
plane shock wave generator
plane source
plane strain
plane strain fracture toughness
plane subsystem
plane sundial
plane surface
plane surface system
plane symmetry
planet
planet aberration
planet aberration, planetary aberration
plane table
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