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光刻投影物镜
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光刻投影物镜
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光刻投影物镜
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lithography projection objectives
光刻投影物镜
将集成电路芯片的掩模图形线条按照-0.25的微缩倍率经曝光投影后复制到硅片上的光刻机组件。是光刻机中最精密的核心部件。
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stable operation
stable orbit
stable organization
stable pair
stable particle
stable period
stable phase
stable point
stable polyhedron
stable polynomial
stable population
stable process
stable programming
stable prominence
stable radical polymers
stable random sequence
stable range
stable range condition
stable range condition SR_k
stable range condition SRk
stable rank
stable reduction
stable reduction theorem
stable region
stable relation
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