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vapor phase epitaxy
释义
vapor phase epitaxy
Encyclopedia
工学
半导体外延生长
释
vapor phase epitaxy
气相外延
反应物通过气相输运,并在气相中或衬底表面进行化学反应,然后生长出晶体粒子,以薄膜形式在衬底上进行外延的半导体外延生长技术。简称VPE。
Physics
凝聚态物理学
结构
vapor phase epitaxy
气相外延
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