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ultra-precision opto-mechanical system
释义
ultra-precision opto-mechanical system
Encyclopedia
工学
光刻投影物镜
释
ultra-precision opto-mechanical system
超精密光机系统
对光学元件进行精确空间定位与高精度面形支撑,同时实现物镜集成阶段的精密装调及使用阶段功能性补偿的光刻投影物镜。
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