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thermally stimulated current spectroscopy
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thermally stimulated current spectroscopy
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〔基本理论〕
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thermally stimulated current spectroscopy
热激电流谱
在低温下利用光激发产生的电子-空穴填充深能级陷阱,然后根据不同升温速率下结电流随温度变化的特性,探测半导体中深能级缺陷的能级位置及其浓度的常用电学测量技术。
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