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荷能粒子轰击或加热蒸发的目标材料。通常指溅射靶材,通过等离子或电子束轰击靶材,在特定的基面上形成10~10000纳米级薄膜,进而通过后续加工工艺形成导电层、栅极、阻挡层、绝缘层和线路等。
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