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surface micromachining
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surface micromachining
Encyclopedia
工学
微纳机电系统
释
surface micromachining
表面微加工
以硅片为基体,通过多层薄膜淀积和图形加工制备三维微机械结构的一种重要的微电子系统加工手段。
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thermo-optic modulator
thermooptometry
thermo-osmosis
thermo oxidative aeing
thermo oxidative ageing
thermo-oxidative ag[e]ing
thermo-oxidative ageing
thermo-oxidative aging
thermooxidative degradation
thermopair
thermopause
thermoperiodicity
thermoperiodism
thermoperiodism of crop
thermophile
thermophiles
thermophilic enzyme
thermophilic enzymes
thermophilric bacteria
thermophily
thermophone
thermophore
thermophoresis
thermophoretic force
thermophosphor
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