“sub-nanometer precision full frequency optical fabrication”的概念、定义、翻译、参考文献-科学参考

单词	sub-nanometer precision full frequency optical fabrication
释义	sub-nanometer precision full frequency optical fabrication Encyclopedia 工学光刻投影物镜释 sub-nanometer precision full frequency optical fabrication亚纳米全频段光学制造物镜元件的表面形貌采用功率谱密度表征，其低频、中频与高频分量分别由面形干涉仪、白光干涉仪和原子力显微镜获得的光学制造技术。
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